E.A. Maximovskii : rechercher sur Z-Library

Le plus grand référentiel d'articles scientifiques au monde. 70,000,000+ d'articles gratuitement.

Don't use scam websites

Livres
Articles (14)
Les plus populaires
Liste
- Liste
- Tableau

1

The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane

N.I. Fainer, Yu.M. Rumyantsev, M.L. Kosinova, G.S. Yurjev, E.A. Maximovskii, F.A. Kuznetsov

Journal:

Applied Surface Science

Année:

1997

Langue:

english

Fichier:

PDF, 386 KB

english, 1997

2

Elemental composition analysis of silicon carbonitride thin films by energy dispersive spectroscopy

Yu. M. Rumyantsev, N. I. Fainer, E. A. Maximovskii, B. M. Ayupov

Journal:

Journal of Structural Chemistry

Année:

2010

Langue:

english

Fichier:

PDF, 346 KB

english, 2010

3

Study of Cu diffusion behavior in carbon rich SiCN:H films deposited from trimethylphenylsilane

Ermakova, E., Mogilnikov, K., Rumyantsev, Yu., Kichay, V., Maximovskii, E., Semenova, O., Kosinova, M.

Journal:

Thin Solid Films

Année:

2015

Langue:

english

Fichier:

PDF, 681 KB

english, 2015

4

Plasma-deposited CdS layers from (o-phen) bis (diethyldithiocarbamate) cadmium

N.I Fainer, Yu.M Rumyantsev, E.G Salman, M.L Kosinova, G.S Yurjev, N.P Sysoeva, E.A Maximovskii, S.V Sysoev, A.N Golubenko

Journal:

Thin Solid Films

Année:

1996

Langue:

english

Fichier:

PDF, 445 KB

english, 1996

5

Study of the structure of thin nanocrystalline films

E. A. Maximovskii, N. I. Fainer, M. L. Kosinova, Yu. M. Rumyantsev

Journal:

Journal of Structural Chemistry

Année:

2004

Langue:

english

Fichier:

PDF, 185 KB

english, 2004

6

Thin silicon carbonitride films are perspective low-k materials

N.I. Fainer, M.L. Kosinova, Yu. M. Rumyantsev, E.A. Maximovskii, F.A. Kuznetsov

Journal:

Journal of Physics and Chemistry of Solids

Année:

2008

Langue:

english

Fichier:

PDF, 917 KB

english, 2008

7

Use of hexamethylcyclotrisilazane for preparation of transparent films of complex compositions

N. I. Fainer, A. N. Golubenko, Yu. M. Rumyantsev, E. A. Maximovskii

Journal:

Glass Physics and Chemistry

Année:

2009

Langue:

english

Fichier:

PDF, 297 KB

english, 2009

8

Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane

M. L. Kosinova, Yu. M. Rumyantsev, L. I. Chernyavskii, L. D. Nikulina, V. G. Kesler, E. A. Maximovskii, N. I. Fainer, V. I. Rakhlin, M. G. Voronkov, F. A. Kuznetsov

Journal:

Glass Physics and Chemistry

Année:

2010

Langue:

english

Fichier:

PDF, 569 KB

english, 2010

9

On the formation of the crystalline phases and nanostructure of silicon carbonitride layers grown on gallium arsenide substrates

N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev, E. A. Maximovskii

Journal:

Journal of Structural Chemistry

Année:

2012

Langue:

english

Fichier:

PDF, 330 KB

english, 2012

10

Composition and structure of silicon carbonitride layers grown on Si(100)/(Fe, N, Co) substrates

N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev, E. A. Maximovskii, S. A. Prokhorova, P. N. Gevko

Journal:

Journal of Structural Chemistry

Année:

2012

Langue:

english

Fichier:

PDF, 750 KB

english, 2012

11

Synthesis of silicon carbonitride dielectric films with improved optical and mechanical properties from tetramethyldisilazane

Fainer, N. I., Golubenko, A. N., Rumyantsev, Yu. M., Kesler, V. G., Maximovskii, E. A., Ayupov, B. M., Kuznetsov, F. A.

Journal:

Glass Physics and Chemistry

Année:

2013

Langue:

english

Fichier:

PDF, 529 KB

english, 2013

12

Bis(trimethylsilyl)Ethylamine: Synthesis, Properties and its use as CVD Precursor

Ermakova, Evgeniya, Lis, Alexey, Kosinova, Marina, Rumyantsev, Yuri, Maximovskii, Eugene, Rakhlin, Vladimir

Journal:

Physics Procedia

Année:

2013

Langue:

english

Fichier:

PDF, 812 KB

english, 2013

13

Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition

Fainer, N. I., Plekhanov, A. G., Rumyantsev, Yu. M., Maximovskii, E. A., Shayapov, V. R., Plekhanov, A. G., Rumyantsev, Yu. M., Maximovskii, E. A., Shayapov, V. R.

Journal:

Glass Physics and Chemistry

Année:

2014

Langue:

english

Fichier:

PDF, 381 KB

english, 2014

14

Boron nitride nanowalls: low-temperature plasma-enhanced chemical vapor deposition synthesis and optical properties

Merenkov, Ivan S, Kosinova, Marina L, Maximovskii, Eugene A

Journal:

Année:

2017

Langue:

english

Fichier:

PDF, 1.83 MB

english, 2017